{"number":"US12697691B2","kindCode":"B2","documentType":"grant","title":{"original":"Electrostatic chuck","english":"Electrostatic chuck"},"abstract":{"original":"An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction.…","english":"An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction.…"},"applicants":["TOTO LTD."],"inventors":["Akihito ONO","Masafumi IKEGUCHI","Tomoki UMETSU","Jumpei UEFUJI"],"filingDate":"2023-03-15","publicationDate":"2026-08-04","grantDate":"2026-08-04","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12697691B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12697691B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12697691B2","ja":"https://downloadpatent.com/ja/patent/US12697691B2"}}