{"number":"US12697698B2","kindCode":"B2","documentType":"grant","title":{"original":"Recycled polishing pad and preparation method thereof","english":"Recycled polishing pad and preparation method thereof"},"abstract":{"original":"According to embodiments of the present invention, there are provided a recycled polishing pad and a process for preparing a recycled polishing pad. The recycled polishing pad comprises a cushion layer, an adhesive layer, and a reused polishing layer having a plurality of grooves on one side, and the compressibility of the reused polishing layer calculated by a specific equation is controlled within a predetermined range; thus, the polishing layer can be reused while excellent polishing rate and polishing uniformity are maintained.","english":"According to embodiments of the present invention, there are provided a recycled polishing pad and a process for preparing a recycled polishing pad. The recycled polishing pad comprises a cushion layer, an adhesive layer, and a reused polishing layer having a plurality of grooves on one side, and the compressibility of the reused polishing layer calculated by a specific equation is controlled within a predetermined range; thus, the polishing layer can be reused while excellent polishing rate and polishing uniformity are maintained."},"applicants":["Enpulse Co., Ltd."],"inventors":["Jungnam LEE","Seungsik YOON","Jaechul CHANG","Jaejung BYUN","Yongsoo CHOI","Yujin SHIN","Jongwoo KIM","Sunghyung OH"],"filingDate":"2025-07-21","publicationDate":"2026-08-04","grantDate":"2026-08-04","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12697698B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12697698B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12697698B2","ja":"https://downloadpatent.com/ja/patent/US12697698B2"}}