{"number":"US12697699B2","kindCode":"B2","documentType":"grant","title":{"original":"Retainer, top ring, and substrate processing apparatus","english":"Retainer, top ring, and substrate processing apparatus"},"abstract":{"original":"A retainer is disposed around a holding region 39 of a polygonal substrate WF in a top ring for holding the polygonal substrate WF with a surface to be polished facing downward. The retainer 30 includes a plurality of retainer main bodies 3 disposed around the holding region 39 independently along respective sides of the polygonal substrate WF. At least one of the plurality of retainer main bodies 3 includes a first securing surface (first surface 3a), a first opposed surface (second surface 3b), a second securing surface (third surface 3c), and a second opposed surface (fourth surface 3d).…","english":"A retainer is disposed around a holding region 39 of a polygonal substrate WF in a top ring for holding the polygonal substrate WF with a surface to be polished facing downward. The retainer 30 includes a plurality of retainer main bodies 3 disposed around the holding region 39 independently along respective sides of the polygonal substrate WF. At least one of the plurality of retainer main bodies 3 includes a first securing surface (first surface 3a), a first opposed surface (second surface 3b), a second securing surface (third surface 3c), and a second opposed surface (fourth surface 3d).…"},"applicants":["EBARA CORPORATION"],"inventors":["Yu ISHII"],"filingDate":"2023-06-16","publicationDate":"2026-08-04","grantDate":"2026-08-04","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12697699B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12697699B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12697699B2","ja":"https://downloadpatent.com/ja/patent/US12697699B2"}}