{"number":"US12697766B2","kindCode":"B2","documentType":"grant","title":{"original":"Imprint apparatus, imprint method, method of manufacturing article, determination method. and non-transitory computer-readable storage medium","english":"Imprint apparatus, imprint method, method of manufacturing article, determination method. and non-transitory computer-readable storage medium"},"abstract":{"original":"The present invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising: a supplier configured to supply the imprint material as a plurality of droplets onto the substrate; and a controller configured to control the supplier based on information indicating a target arrangement of the imprint material to be supplied as the plurality of droplets onto a predetermined region of the substrate, wherein the plurality of droplets in the target arrangement include a first droplet group including a plurality of first droplet a…","english":"The present invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising: a supplier configured to supply the imprint material as a plurality of droplets onto the substrate; and a controller configured to control the supplier based on information indicating a target arrangement of the imprint material to be supplied as the plurality of droplets onto a predetermined region of the substrate, wherein the plurality of droplets in the target arrangement include a first droplet group including a plurality of first droplet a…"},"applicants":["CANON KABUSHIKI KAISHA"],"inventors":["Toshihiko Nishida"],"filingDate":"2024-07-11","publicationDate":"2026-08-04","grantDate":"2026-08-04","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12697766B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12697766B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12697766B2","ja":"https://downloadpatent.com/ja/patent/US12697766B2"}}