{"number":"US12702976B2","kindCode":"B2","documentType":"grant","title":{"original":"Flow cells and methods for making the same","english":"Flow cells and methods for making the same"},"abstract":{"original":"A metal film is formed over a resin layer including a plurality of multi-depth depressions (MDP) separated by interstitial regions, each MDP including a deep portion and an adjacent shallow portion. A sacrificial layer is formed over the metal film. The sacrificial layer and metal film are sequentially dry etched to expose a resin layer surface at the shallow portion and interstitial regions.…","english":"A metal film is formed over a resin layer including a plurality of multi-depth depressions (MDP) separated by interstitial regions, each MDP including a deep portion and an adjacent shallow portion. A sacrificial layer is formed over the metal film. The sacrificial layer and metal film are sequentially dry etched to expose a resin layer surface at the shallow portion and interstitial regions.…"},"applicants":["ILLUMINA, INC."],"inventors":["Jeffrey S. Fisher","Anthony Flannery","Sahngki Hong","Brinda Kodira Cariappa","Lewis J. Kraft","Brian D. Mather"],"filingDate":"2022-05-09","publicationDate":"2026-08-11","grantDate":"2026-08-11","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12702976B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12702976B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12702976B2","ja":"https://downloadpatent.com/ja/patent/US12702976B2"}}