{"number":"US12702998B2","kindCode":"B2","documentType":"grant","title":{"original":"Liquid supply unit having tank provided with circulation line, apparatus for treating substrate, including the same, and method of treating substrate","english":"Liquid supply unit having tank provided with circulation line, apparatus for treating substrate, including the same, and method of treating substrate"},"abstract":{"original":"Disclosed is a method of treating a substrate, the method including: adjusting a temperature of a treatment liquid by heating the treatment liquid with a heater unit installed in the circulation line while circulating the treatment liquid in a housing of a tank through a circulation line coupled to the housing; treating a substrate by supplying a temperature-controlled treatment liquid to the substrate in a normal mode; and discharging a treatment liquid in the circulation line to the outside of the circulation line through a drain line connected to the circulation line in an emergency mode.","english":"Disclosed is a method of treating a substrate, the method including: adjusting a temperature of a treatment liquid by heating the treatment liquid with a heater unit installed in the circulation line while circulating the treatment liquid in a housing of a tank through a circulation line coupled to the housing; treating a substrate by supplying a temperature-controlled treatment liquid to the substrate in a normal mode; and discharging a treatment liquid in the circulation line to the outside of the circulation line through a drain line connected to the circulation line in an emergency mode."},"applicants":["SEMES CO., LTD."],"inventors":["IN RYU JEON","MU HYEON LEE"],"filingDate":"2022-12-13","publicationDate":"2026-08-11","grantDate":"2026-08-11","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12702998B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12702998B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12702998B2","ja":"https://downloadpatent.com/ja/patent/US12702998B2"}}