{"number":"US12703058B2","kindCode":"B2","documentType":"grant","title":{"original":"Surface property measuring system, surface property measuring method, polishing apparatus, and polishing method","english":"Surface property measuring system, surface property measuring method, polishing apparatus, and polishing method"},"abstract":{"original":"A surface property measuring system capable of accurately measuring a surface property of a polishing pad without damaging the polishing pad and without reducing throughput of the entire polishing process is disclosed. The surface property measuring system includes: an optical measuring device configured to direct light to a polishing surface of a polishing pad when the polishing pad is rotating, and measure a surface property of the polishing pad based on reflected light from the polishing surface; a cover member disposed between the optical measuring device and the polishing pad; and a trans…","english":"A surface property measuring system capable of accurately measuring a surface property of a polishing pad without damaging the polishing pad and without reducing throughput of the entire polishing process is disclosed. The surface property measuring system includes: an optical measuring device configured to direct light to a polishing surface of a polishing pad when the polishing pad is rotating, and measure a surface property of the polishing pad based on reflected light from the polishing surface; a cover member disposed between the optical measuring device and the polishing pad; and a trans…"},"applicants":["EBARA CORPORATION"],"inventors":["Toshifumi KIMBA","Kohei OHSHIMA","Kohei OTA"],"filingDate":"2023-04-20","publicationDate":"2026-08-11","grantDate":"2026-08-11","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12703058B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12703058B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12703058B2","ja":"https://downloadpatent.com/ja/patent/US12703058B2"}}