{"number":"US12703063B2","kindCode":"B2","documentType":"grant","title":{"original":"Substrate processing apparatus","english":"Substrate processing apparatus"},"abstract":{"original":"The substrate processing apparatus according to the disclosure is a substrate processing apparatus for processing a substrate. The substrate processing apparatus includes a swing module, which includes a base portion, an arm which is supported by the base portion and is rotatable about the base portion, and a cover which covers an upper surface of the arm. The cover has an elongated shape in plan view and has a protrusion formed on an outer peripheral portion of an upper surface of the cover to protrude upward.…","english":"The substrate processing apparatus according to the disclosure is a substrate processing apparatus for processing a substrate. The substrate processing apparatus includes a swing module, which includes a base portion, an arm which is supported by the base portion and is rotatable about the base portion, and a cover which covers an upper surface of the arm. The cover has an elongated shape in plan view and has a protrusion formed on an outer peripheral portion of an upper surface of the cover to protrude upward.…"},"applicants":["EBARA CORPORATION"],"inventors":["MATSUTARO MIYAMOTO"],"filingDate":"2023-09-06","publicationDate":"2026-08-11","grantDate":"2026-08-11","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12703063B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12703063B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12703063B2","ja":"https://downloadpatent.com/ja/patent/US12703063B2"}}