{"number":"US12703087B2","kindCode":"B2","documentType":"grant","title":{"original":"Substrate transfer robot and substrate processing apparatus including substrate transfer robot","english":"Substrate transfer robot and substrate processing apparatus including substrate transfer robot"},"abstract":{"original":"A substrate transfer robot includes a hand and a robot control unit. The hand includes: four guides (including a guide disposed on a distal end of the hand body) that are provided on the top surface of a hand body, and receive an outer edge portion of the substrate; a pusher disposed on a proximal end of the hand body; a pusher actuator that moves the pusher horizontally; and a weight sensor unit that measures the weight of the substrate placed on the hand.…","english":"A substrate transfer robot includes a hand and a robot control unit. The hand includes: four guides (including a guide disposed on a distal end of the hand body) that are provided on the top surface of a hand body, and receive an outer edge portion of the substrate; a pusher disposed on a proximal end of the hand body; a pusher actuator that moves the pusher horizontally; and a weight sensor unit that measures the weight of the substrate placed on the hand.…"},"applicants":["SCREEN Holdings Co., Ltd."],"inventors":["Yuichi TAKAYAMA","Hiroyuki KAWAHARA","Takuya SATO"],"filingDate":"2024-11-27","publicationDate":"2026-08-11","grantDate":"2026-08-11","verifiedWithOffice":true,"pdfUrl":"https://downloadpatent.com/pdf/US12703087B2.pdf","pages":{"en":"https://downloadpatent.com/patent/US12703087B2","zh-Hant":"https://downloadpatent.com/zh-Hant/patent/US12703087B2","ja":"https://downloadpatent.com/ja/patent/US12703087B2"}}