美國
US 12,697,691 B2
Electrostatic chuck
US 12,697,691 B2 是美國專利商標局（USPTO）的核准專利，日期 2026-08-04。申請人：TOTO LTD.。PDF 可在本頁下載，未登入每天最多 5 篇。
- 申請人
- TOTO LTD.
- 發明人
- Akihito ONO; Masafumi IKEGUCHI; Tomoki UMETSU; Jumpei UEFUJI
- 公開日
- 2026-08-04
- 申請日
- 2023-03-15
- 文件種類
- B2 核准公告
- 也寫作
- US 12,697,691 B2 · US12697691 · 12697691
摘要
An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction.…
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專利局網站： 美國專利商標局（USPTO）