美國
US 12,697,766 B2
Imprint apparatus, imprint method, method of manufacturing article, determination method. and non-transitory computer-readable storage medium
US 12,697,766 B2 是美國專利商標局（USPTO）的核准專利，日期 2026-08-04。申請人：CANON KABUSHIKI KAISHA。PDF 可在本頁下載，未登入每天最多 5 篇。
- 申請人
- CANON KABUSHIKI KAISHA
- 發明人
- Toshihiko Nishida
- 公開日
- 2026-08-04
- 申請日
- 2024-07-11
- 文件種類
- B2 核准公告
- 也寫作
- US 12,697,766 B2 · US12697766 · 12697766
摘要
The present invention provides an imprint apparatus that forms a pattern of an imprint material on a substrate using a mold, the apparatus comprising: a supplier configured to supply the imprint material as a plurality of droplets onto the substrate; and a controller configured to control the supplier based on information indicating a target arrangement of the imprint material to be supplied as the plurality of droplets onto a predetermined region of the substrate, wherein the plurality of droplets in the target arrangement include a first droplet group including a plurality of first droplet a…
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專利局網站： 美國專利商標局（USPTO）