美國
US 12,703,006 B2
Method for manufacturing ultrasonic transducer, ultrasonic transducer, and distance measuring equipment
US 12,703,006 B2 是美國專利商標局（USPTO）的核准專利，日期 2026-08-11。申請人：Mitsubishi Electric Corporation。PDF 可在本頁下載，未登入每天最多 5 篇。
- 申請人
- Mitsubishi Electric Corporation
- 發明人
- Yoshiaki HIRATA; Yoshitaka KAJIYAMA
- 公開日
- 2026-08-11
- 申請日
- 2024-06-25
- 文件種類
- B2 核准公告
- 也寫作
- US 12,703,006 B2 · US12703006 · 12703006
摘要
A method for manufacturing an ultrasonic transducer comprises the following steps: A first SOI substrate including a first silicon film, a second silicon film, and an intermediate silicon oxide film sandwiched between the first silicon film and the second silicon film is prepared. A piezoelectric element is formed on the first silicon film of the first SOI substrate. The second silicon film is etched to form a diaphragm. A silicon substrate is connected to the second silicon film.…
這裡只列摘要開頭，完整內容在 PDF 裡。
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專利局網站： 美國專利商標局（USPTO）