CN 112898028 A

Abstract

本发明涉及陶瓷基板的制备领域，提供一种采用石墨炉烧结的氮化铝陶瓷基板的制备方法，解决现有技术的氮化铝基板热导率低、表面不平整及生产效率不高的缺陷，包括以下制备步骤：1)准备原材料：以氮化铝粉体为主原料，以Y2O3、CaF2为烧结助剂；2)球磨；3)脱泡；4)流延；5)冲片：送入冲片机进行冲片分切；6)等静压：将分切后的坯体送入等静压机进行等静压处理，所述等静压的压力为10－14MPa，温度为80－90℃；7)电动敷粉；8)调解挡板位置；9)排胶；10)石墨炉烧结；11)研磨、激光、清洗处理。

English (machine translation): The invention relates to the field of preparation of ceramic substrates, and provides a method for preparing an aluminum nitride ceramic substrate sintered by a graphite furnace, which overcomes the defects of low thermal conductivity, uneven surface and low production efficiency of an aluminum nitride substrate in the prior art and comprises the following preparation steps: 1) preparing raw materials: using aluminum nitride powder as main material and Y as main material2O3、CaF2Is a sintering aid; 2) ball milling; 3) defoaming; 4) casting; 5) punching: feeding the mixture into a sheet punching…

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