United States
US 12,697,691 B2
Electrostatic chuck
US 12,697,691 B2 is a granted patent from the United States Patent and Trademark Office (USPTO), dated 2026-08-04. Applicant: TOTO LTD. Its PDF downloads from this page without an account, up to 5 a day.
- Applicant
- TOTO LTD.
- Inventors
- Akihito ONO; Masafumi IKEGUCHI; Tomoki UMETSU; Jumpei UEFUJI
- Publication date
- 2026-08-04
- Filing date
- 2023-03-15
- Document type
- B2 Granted patent
- Also written as
- US 12,697,691 B2 · US12697691 · 12697691
Abstract
An electrostatic chuck includes a ceramic dielectric substrate and a base plate. The base plate includes a communicating path configured to allow a coolant to pass. The communicating path includes a first flow path part having a pair of side surfaces along a first direction. The first direction is along a flow of the coolant. When viewed along a stacking direction, one side surface of the pair of side surfaces includes a plurality of convex portions and a plurality of concave portions. The plurality of convex portions is convex in a second direction.…
The opening of the abstract. The full text is in the PDF.
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Patent office website: United States Patent and Trademark Office (USPTO)
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