United States
US 12,702,998 B2
Liquid supply unit having tank provided with circulation line, apparatus for treating substrate, including the same, and method of treating substrate
US 12,702,998 B2 is a granted patent from the United States Patent and Trademark Office (USPTO), dated 2026-08-11. Applicant: SEMES CO., LTD. Its PDF downloads from this page without an account, up to 5 a day.
- Applicant
- SEMES CO., LTD.
- Inventors
- IN RYU JEON; MU HYEON LEE
- Publication date
- 2026-08-11
- Filing date
- 2022-12-13
- Document type
- B2 Granted patent
- Also written as
- US 12,702,998 B2 · US12702998 · 12702998
Abstract
Disclosed is a method of treating a substrate, the method including: adjusting a temperature of a treatment liquid by heating the treatment liquid with a heater unit installed in the circulation line while circulating the treatment liquid in a housing of a tank through a circulation line coupled to the housing; treating a substrate by supplying a temperature-controlled treatment liquid to the substrate in a normal mode; and discharging a treatment liquid in the circulation line to the outside of the circulation line through a drain line connected to the circulation line in an emergency mode.
The opening of the abstract. The full text is in the PDF.
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Patent office website: United States Patent and Trademark Office (USPTO)
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