United States
US 12,703,087 B2
Substrate transfer robot and substrate processing apparatus including substrate transfer robot
US 12,703,087 B2 is a granted patent from the United States Patent and Trademark Office (USPTO), dated 2026-08-11. Applicant: SCREEN Holdings Co., Ltd. Its PDF downloads from this page without an account, up to 5 a day.
- Applicant
- SCREEN Holdings Co., Ltd.
- Inventors
- Yuichi TAKAYAMA; Hiroyuki KAWAHARA; Takuya SATO
- Publication date
- 2026-08-11
- Filing date
- 2024-11-27
- Document type
- B2 Granted patent
- Also written as
- US 12,703,087 B2 · US12703087 · 12703087
Abstract
A substrate transfer robot includes a hand and a robot control unit. The hand includes: four guides (including a guide disposed on a distal end of the hand body) that are provided on the top surface of a hand body, and receive an outer edge portion of the substrate; a pusher disposed on a proximal end of the hand body; a pusher actuator that moves the pusher horizontally; and a weight sensor unit that measures the weight of the substrate placed on the hand.…
The opening of the abstract. The full text is in the PDF.
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Patent office website: United States Patent and Trademark Office (USPTO)
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